PPT Slide

SPIN COAT

HMDS

4500 rpm, 60 sec.

S-8 RESIST

4500 rpm, 60 sec.

SOFT BAKE

90 °C

60 sec.

DEHYDRATE BAKE

250 °C, 120 sec.

7,3,3 COAT

7,2,2 DEVELOP

POST EXPOSURE BAKE

115 °C, 60 sec.

HARD BAKE

125 °C, 60 sec.

DEVELOP

DI Wet

CD-26 Developer

50 sec., Puddle

Rinse, Spin Dry

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