PPT Slide
MEASUREMENT OF 4 µm CRITICAL DIMENSION (CD)
Using an Optical microscope at 100X find the resolution target for the current photo level and set it up so that you can compare the 4 micrometer line/space pattern to the scale below. Estimate the size of the 4 micrometer line of photoresist or the size of the 4 micrometer opening in the photoresist.
5.0 4.5 4.0 3.5 3.0 2.5µm