ASH RESIST, RCA CLEANGATE OXIDE GROWTH @ 700 A

700 Å SiO2

Push at 900 C in N2

Ramp to 1100 C in dry O2

Start Soak at 1090 C

Time = 50 min. in dry O2

Ramp down to 1000 C in N2

Pull at 1000 C in N2

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