PPT Slide

DI water

rinse, 5 min.

H20 - 50

HF - 1

60 sec.

HPM

HCL - 1part

H2O2 - 3parts

H2O - 15parts

70 °C, 15 min.

SPIN/RINSE

DRY

APM

NH4OH - 1part

H2O2 - 3parts

H2O - 15parts

70 °C, 15 min.

RCACLEAN.IMG

DI water

rinse, 5 min.

DI water

rinse, 5 min.

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